Course Schedule and Catalog
Course Catalog - 2022-2023
ELEC 523 - INTRO TO MICROFABRICATION
Long Title: INTRODUCTION TO MICROFABRICATION
Department: Electrical & Computer Eng.
Grade Mode: Standard Letter
Language of Instruction: Taught in English
Course Type: Lecture
Credit Hours: 3
Restrictions:
Must be enrolled in one of the following Level(s):
Graduate
Description: Microfabrication and nanofabrication are among the most important electrical and computer engineering technologies, and are the basis of manufacturing for nearly all modern miniaturized systems. This course provides an introduction to integrated circuit device fabrication and micromachining technology, including film deposition, lithography, etching, thermal oxidation, ion implantation, impurity diffusion, contacts and interconnections, and process integration topics. Recommended Prerequisite(s): Introductory physics (mechanics, electricity and magnetism), introductory chemistry.