Course Catalog - 2018-2019

     

ELEC 545 - THIN FILMS

Long Title: THIN FILMS
Department: Electrical & Computer Eng.
Grade Mode: Standard Letter
Course Type: Lecture
Credit Hours: 3
Restrictions:
Must be enrolled in one of the following Level(s):
Graduate
Description: Deposition methods, structure, properties, performance and failure mechanisms of thin solid films for various applications. Deposition methods include sputtering, plating, evaporation and chemical vapor deposition. Material types include crystalline and amorphous metals as well as semiconductors and insulators. Applications are primarily in microelectronics; data storage; micro-electro-mechanical systems, wear and corrosion prevention and thermal barriers. NOTE: Not offered every year. Cross-list: MSNE 545.