ELEC 545 - THIN FILMS
Long Title: THIN FILMS
Department: Electrical & Computer Eng.
Grade Mode: Standard Letter
Language of Instruction: Taught in English
Course Type: Lecture
Credit Hours: 3
Description: Deposition methods, structure, properties, performance and failure mechanisms of thin solid films for various applications. Deposition methods include sputtering, plating, evaporation and chemical vapor deposition. Material types include crystalline and amorphous metals as well as semiconductors and insulators. Applications are primarily in microelectronics; data storage; micro-electro-mechanical systems, wear and corrosion prevention and thermal barriers. NOTE: Not offered every year. Cross-list: MSNE 545.