Course Schedule and Catalog

Department: *Mech Eng & Materials Science*

Grade Mode: Standard Letter

Course Type: Lecture

Credit Hours: 3

Description: THIN FILMS ***** Exploration of materials issues relevant to thin films. Include techniques for vapor phase deposition of thin films (e.g., evaporation, sputtering, and chemical vapor deposition), epitaxy, generation of thin film defects, strain, growth anistropy, and grain structure, as well as electrical, optical, and magnetic properties of thin film materials and structures. ***** Also offerd as ELEC 545.