Course Catalog - 2003-2004

     

ELEC 645 - THIN FILMS

Long Title:
Department: Electrical & Computer Eng.
Grade Mode: Standard Letter
Course Type: Lecture
Credit Hours: 3
Description: THIN FILMS ***** Deposition, characterization, and evaluation of the electronic, magnetic, and mechanical properties of thin films will be discussed. Special problems associated with the application of conventional bulk material characterization techniques to the case of thin films will be considered. The applications of thin films to devices such as transistors, integrated circuits, memory arrays, surface acoustic wave devices, optical waveguides and modulators, and microelectromechanical systems will be covered.