Course Schedule - Fall Semester 2021

     

ELEC 523 001 (CRN: 14300)

INTRO TO MICROFABRICATION

Long Title: INTRODUCTION TO MICROFABRICATION
Department: Electrical & Computer Eng.
Instructor: Xie, Chong
Meeting: 4:00PM - 5:15PM MW BRC 286 (23-AUG-2021 - 3-DEC-2021) 
Session: Full Term
Grade Mode: Standard Letter
Course Type: Lecture
Language of Instruction: Taught in English
Method of Instruction: Face to Face
Credit Hours: 3
Course Syllabus:
Course Materials: Rice Campus Store
 
Restrictions:
Must be enrolled in one of the following Level(s):
Graduate
Section Max Enrollment: 29
Section Enrolled: 12
Enrollment data as of: 30-SEP-2022 7:55AM
 
Additional Fees: None
 
Final Exam: GR Course-Dept Schedules Exam
 
Description: Microfabrication and nanofabrication are among the most important electrical and computer engineering technologies, and are the basis of manufacturing for nearly all modern miniaturized systems. This course provides an introduction to integrated circuit device fabrication and micromachining technology, including film deposition, lithography, etching, thermal oxidation, ion implantation, impurity diffusion, contacts and interconnections, and process integration topics. Recommended Prerequisite(s): Introductory physics (mechanics, electricity and magnetism), introductory chemistry.