Course Schedule and Catalog

Long Title: THIN FILMS

Department: *Mech Eng & Materials Science*

Grade Mode: Standard Letter

Course Type: Lecture

Credit Hours: 3

Description: Deposition methods, structure, properties, performance and failure mechanisms of thin solid films for various applications. Deposition methods include sputtering, plating, evaporation and chemical vapor deposition. Material types include crystalline and amorphous metals as well as semiconductors and insulators. Applications are primarily in microelectronics; data storage; micro-electro-mechanical systems, wear and corrosion prevention and thermal barriers. Cross-list: ELEC 545.