Course Schedule and Catalog

Long Title: THIN FILMS

Department: *Mech Eng & Materials Science*

Grade Mode: Standard Letter

Course Type: Lecture

Credit Hours: 3

Description: Exploration of materials issues relevant to thin films. Includes techniques for vapor phase deposition of thin films (e.g., evaporation, sputtering, and chemical vapor deposition), epitaxy, generation of thin film defects, strain, growth anisotropy, and grain structure, as well as electrical, optical, and magnetic properties of thin film materials and structures. Cross-list: ELEC 545.